Mask Aligner EMA 400
Product Features
- Economical, Compact & Hi-Level Performance
- Viewing fused image of two alignment marks in the field of view
- Integrator lens for exposure
- LED illuminator
Application (Micromachine development in R&D center and university)
- Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc
- Exposure for Flip Chip/BGA/CSP
- Exposure for Optical/High Speed Communication Components
Alignment Scope |
Objectives separation |
15 ˜ 75mm |
Total magnification |
100X |
Illuminator for observation |
Red LED (=633 nm) |
X, Y Movement range of stage |
±5 mm |
Adjustment |
±5° |
Utility |
Power source for main body and mercury lamp |
AC 100V 50/60Hz 15A |
Vacuum source |
Below 21.3 Kpa (-80 Kpa from atmospheric pressure) |
Exposure Unit |
Lens |
Integrator lens |
Mercury lamp |
250W ultra-high pressure vapor mercury lamp |
Effective exposure area |
Max 100 mm |
Intensity distribution |
±5% or less |
Intensity of illumination |
20 mW/cm2 (405 nm) |
Exposure time control |
Digital timer and rotary solenoid |
Mercury Lamp Lighting Unit |
AC 110V |
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